Invention Grant
- Patent Title: Movable table and processing stage
- Patent Title (中): 活动台和加工台
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Application No.: US12742177Application Date: 2008-11-11
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Publication No.: US08485507B2Publication Date: 2013-07-16
- Inventor: Yuya Inoue , Hisato Tanaka , Tamotsu Tanifuji
- Applicant: Yuya Inoue , Hisato Tanaka , Tamotsu Tanifuji
- Applicant Address: JP Chigasaki-Shi
- Assignee: Ulvac, Inc.
- Current Assignee: Ulvac, Inc.
- Current Assignee Address: JP Chigasaki-Shi
- Agency: Grossman, Tucker, Perreault & Pfleger, PLLC
- Priority: JPP2007-294402 20071113
- International Application: PCT/JP2008/070524 WO 20081111
- International Announcement: WO2009/063877 WO 20090522
- Main IPC: B23B1/25
- IPC: B23B1/25
Abstract:
A movable table, which has a substrate to be processed mounted thereon and moves, includes: a main plate formed of a metallic material; and a plurality of sub plates which is disposed on the main plate and is formed of a material with a hardness higher than the metallic material, and the top surfaces of the plurality of sub plates are mounting surfaces of the substrate to be processed.
Public/Granted literature
- US20100276858A1 MOVABLE TABLE AND PROCESSING STAGE Public/Granted day:2010-11-04
Information query
