Invention Grant
US08485640B2 Nozzle plate, droplet discharge head, method for manufacturing the same and droplet discharge device 有权
喷嘴板,液滴喷射头,制造方法和液滴喷射装置

Nozzle plate, droplet discharge head, method for manufacturing the same and droplet discharge device
Abstract:
A nozzle plate includes a silicon substrate, and a nozzle hole formed in the silicon substrate for discharging a liquid droplet provided with: a first nozzle portion formed perpendicularly to a surface of the silicon substrate; a second nozzle portion formed on a same axis as an axis of the first nozzle portion and having a cross-sectional area that is larger than a cross-sectional area of the first nozzle portion; and an inclined portion having a cross-sectional area gradually increasing from the first nozzle portion to the second nozzle portion.
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