Invention Grant
US08485771B2 Load port apparatus and dust exhaust method for load port apparatus
有权
负载端口设备负载端口设备和除尘方法
- Patent Title: Load port apparatus and dust exhaust method for load port apparatus
- Patent Title (中): 负载端口设备负载端口设备和除尘方法
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Application No.: US12880861Application Date: 2010-09-13
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Publication No.: US08485771B2Publication Date: 2013-07-16
- Inventor: Mutsuo Sasaki , Hitoshi Suzuki , Koichiro Oikawa
- Applicant: Mutsuo Sasaki , Hitoshi Suzuki , Koichiro Oikawa
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-216436 20090918
- Main IPC: B65G49/07
- IPC: B65G49/07

Abstract:
In a load port apparatus, a door driving mechanism that supports a door through a communication opening portion leading to a mini-environment is housed in a housing chamber that is in communication with the mini-environment through the communication opening portion. Exhaust opening portions are provided in the upper portion of a wall of the housing chamber that is opposed to the communication opening portion and a bottom wall of the housing chamber. Thus, gas passages from the mini-environment to the housing chamber and then to the external space are formed. Thus, dust in the load port apparatus is removed.
Public/Granted literature
- US20110070055A1 LOAD PORT APPARATUS AND DUST EXHAUST METHOD FOR LOAD PORT APPARATUS Public/Granted day:2011-03-24
Information query
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