A fine structure formation apparatus includes a preheating heater to heat up the surface of belt-like mold alone, right before contacting the belt-like mold to heating and pressurizing rollers, the temperature of the surface of the belt-like mold is made equal to that of the heating and pressurizing rollers, enabling to reliably obtain a predetermined temperature, and cooling rollers or a cooling blower are arranged right after the heating and pressurizing rollers, enabling cooling by a forced cooling and pressure holding, and to transfer a pattern.