Invention Grant
- Patent Title: Double-side polishing apparatus and method for polishing both sides of wafer
- Patent Title (中): 双面抛光装置和抛光晶圆两面的方法
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Application No.: US12788902Application Date: 2010-05-27
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Publication No.: US08485864B2Publication Date: 2013-07-16
- Inventor: Masanori Furukawa
- Applicant: Masanori Furukawa
- Applicant Address: JP Nagano
- Assignee: Fujikoshi Machinery Corp.
- Current Assignee: Fujikoshi Machinery Corp.
- Current Assignee Address: JP Nagano
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2009-134449 20090603
- Main IPC: B24B41/06
- IPC: B24B41/06 ; B24B29/04 ; B24B1/00

Abstract:
The double-side polishing apparatus is capable of uniformly polishing a wafer and highly preventing an outer edge of the wafer from being damaged. The apparatus comprises: a lower polishing plate and an upper polishing plate for polishing both sides of the wafer; a carrier having a main body part, in which a through-hole for holding the wafer is formed. Edges of the through-hole in an upper face and a lower face of the carrier are coated with coating layers, which are composed of an abrasion-resistant material and which have a prescribed width and a prescribed thickness. A resin cushion ring, which has a prescribed width and whose thickness is equal to that of the main body part of the carrier, is provided to an inner circumferential face of the thorough-hole. The wafer is held in the resin cushion ring.
Public/Granted literature
- US20100311312A1 DOUBLE-SIDE POLISHING APPARATUS AND METHOD FOR POLISHING BOTH SIDES OF WAFER Public/Granted day:2010-12-09
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