Invention Grant
- Patent Title: Methods for fabrication of positional and compositionally controlled nanostructures on substrate
- Patent Title (中): 在衬底上制造位置和组成受控的纳米结构的方法
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Application No.: US10599106Application Date: 2004-10-14
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Publication No.: US08486287B2Publication Date: 2013-07-16
- Inventor: Ji Zhu , Jeff Grunes , Yang-Kyu Choi , Jeffrey Bokor , Gabor Somorjai
- Applicant: Ji Zhu , Jeff Grunes , Yang-Kyu Choi , Jeffrey Bokor , Gabor Somorjai
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: Lawrence Berkeley National Laboratory
- Agent Robin C. Chiang
- International Application: PCT/US2004/034079 WO 20041014
- International Announcement: WO2005/094231 WO 20051013
- Main IPC: H01L21/285
- IPC: H01L21/285 ; H01L21/302 ; H01L27/00
Abstract:
Fabrication methods disclosed herein provide for a nanoscale structure or a pattern comprising a plurality of nanostructures of specific predetermined position, shape and composition, including nanostructure arrays having large area at high throughput necessary for industrial production. The resultant nanostracture patterns are useful for nanostructure arrays, specifically sensor and catalytic arrays.
Public/Granted literature
- US20070215960A1 Methods for Fabrication of Positional and Compositionally Controlled Nanostructures on Substrate Public/Granted day:2007-09-20
Information query
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