Invention Grant
- Patent Title: Method for the production of multiplayer electrostatic lens array
- Patent Title (中): 多层静电透镜阵列的制造方法
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Application No.: US11990907Application Date: 2006-08-05
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Publication No.: US08487268B2Publication Date: 2013-07-16
- Inventor: Dagmar Gerthsen , Fabian Perez-Willard , Katrin Schultheiss
- Applicant: Dagmar Gerthsen , Fabian Perez-Willard , Katrin Schultheiss
- Agency: Reising Ethington P.C.
- Priority: DE102005040267 20050824
- International Application: PCT/EP2006/007780 WO 20060805
- International Announcement: WO2007/022862 WO 20070301
- Main IPC: G21K5/04
- IPC: G21K5/04 ; H01J37/24
Abstract:
The invention relates to a method for the production of a multilayer electrostatic lens arrangement with at least one lens electrode in general, a method for the production of a phase plate in particular as well as the lens arrangement, the phase plate and a transmission electron microscope with the phase plate.The lens arrangement or the phase plate is produced from a thin self-supporting silicon nitride membrane which is fixed in a macroscopic chip with deposition of further layers.The central bore as well as the aperture opening are milled out by means of an ion beam.
Public/Granted literature
- US20100065741A1 Method For The Production Of Multiplayer Electrostatic Lens Array Public/Granted day:2010-03-18
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