Invention Grant
US08487388B2 Solid-state image pickup apparatus, method for manufacturing same, and electronic device 有权
固体摄像装置及其制造方法以及电子装置

  • Patent Title: Solid-state image pickup apparatus, method for manufacturing same, and electronic device
  • Patent Title (中): 固体摄像装置及其制造方法以及电子装置
  • Application No.: US13105196
    Application Date: 2011-05-11
  • Publication No.: US08487388B2
    Publication Date: 2013-07-16
  • Inventor: Kazunobu Ota
  • Applicant: Kazunobu Ota
  • Applicant Address: JP Tokyo
  • Assignee: Sony Corporation
  • Current Assignee: Sony Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Dentons US LLP
  • Priority: JP2010-116461 20100520; JP2011-070424 20110328
  • Main IPC: H01L31/02
  • IPC: H01L31/02 H01L29/84 H01L31/18
Solid-state image pickup apparatus, method for manufacturing same, and electronic device
Abstract:
A solid-state image pickup apparatus includes a substrate, a solid-state image pickup device, and a Micro Electro Mechanical Systems (MEMS) device. The solid-state image pickup device and the MEMS device are configured to be formed on the same substrate.
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