Invention Grant
US08487432B2 Electronic structures including barrier layers and/or oxidation barriers defining lips and related methods
有权
电子结构包括阻挡层和/或定义唇缘的氧化屏障和相关方法
- Patent Title: Electronic structures including barrier layers and/or oxidation barriers defining lips and related methods
- Patent Title (中): 电子结构包括阻挡层和/或定义唇缘的氧化屏障和相关方法
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Application No.: US12907430Application Date: 2010-10-19
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Publication No.: US08487432B2Publication Date: 2013-07-16
- Inventor: Glenn A. Rinne , J. Daniel Mis
- Applicant: Glenn A. Rinne , J. Daniel Mis
- Applicant Address: US AZ Chandler
- Assignee: Amkor Technology, Inc.
- Current Assignee: Amkor Technology, Inc.
- Current Assignee Address: US AZ Chandler
- Agency: McAndrews, Held & Malloy
- Main IPC: H01L23/48
- IPC: H01L23/48
Abstract:
An electronic device may include a substrate, a seed layer on the substrate, a barrier layer on the seed layer opposite the substrate, and an oxidation barrier on the barrier layer opposite the seed layer. The barrier layer and the seed layer comprise different materials, and the oxidation barrier and the barrier layer may comprise different materials. The seed layer may be undercut relative to the barrier layer and/or relative to the oxidation barrier so that the barrier layer and/or the oxidation barrier define a lip extending beyond the seed layer in a direction parallel with respect to a surface of the substrate. Related methods are also discussed.
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