Invention Grant
US08487438B2 Integrated circuit system having different-size solder bumps and different-size bonding pads
有权
集成电路系统具有不同尺寸的焊料凸块和不同尺寸的焊盘
- Patent Title: Integrated circuit system having different-size solder bumps and different-size bonding pads
- Patent Title (中): 集成电路系统具有不同尺寸的焊料凸块和不同尺寸的焊盘
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Application No.: US12484099Application Date: 2009-06-12
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Publication No.: US08487438B2Publication Date: 2013-07-16
- Inventor: Yaojian Lin , Byung Tai Do , Romeo Emmanuel P. Alvarez
- Applicant: Yaojian Lin , Byung Tai Do , Romeo Emmanuel P. Alvarez
- Applicant Address: SG Singapore
- Assignee: Stats Chippac Ltd.
- Current Assignee: Stats Chippac Ltd.
- Current Assignee Address: SG Singapore
- Agency: Ishimaru & Associates LLP
- Agent I-Chang John Yang
- Main IPC: H01L23/485
- IPC: H01L23/485

Abstract:
An integrated circuit solder bumping system provides a substrate and forms a redistribution layer on the substrate. An insulation layer is formed on the redistribution layer. The insulation layer has a plurality of openings therethrough. A first UBM layer of titanium is deposited on the insulation layer and in the openings therethrough. A second UBM layer of chromium/copper alloy is deposited on the first UBM layer. A third UBM layer of copper is deposited on the second UBM layer. UBM pads of at least two different sizes are formed from the UBM layers. Solder paste is printed over at least some of the UBM pads. The solder paste is reflowed to form at least smaller solder bumps on at least some of the UBM pads. Bigger solder bumps are formed on at least some of the UBM pads.
Public/Granted literature
- US20090250813A1 INTEGRATED CIRCUIT SOLDER BUMPING SYSTEM Public/Granted day:2009-10-08
Information query
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