Invention Grant
- Patent Title: Line edge roughness measuring technique and test structure
- Patent Title (中): 线边粗糙度测量技术和测试结构
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Application No.: US12919488Application Date: 2009-03-01
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Publication No.: US08488128B2Publication Date: 2013-07-16
- Inventor: Boaz Brill
- Applicant: Boaz Brill
- Applicant Address: IL Rehovot
- Assignee: Nova Measuring Instruments Ltd.
- Current Assignee: Nova Measuring Instruments Ltd.
- Current Assignee Address: IL Rehovot
- Agency: AlphaPatent Associates Ltd.
- Agent Daniel J. Swirsky
- International Application: PCT/IL2009/000233 WO 20090301
- International Announcement: WO2009/107143 WO 20090903
- Main IPC: G01B11/30
- IPC: G01B11/30
Abstract:
A test structure is presented test structure on a substrate for monitoring a LER and/or LWR effect, said test structure comprising an array of features manufactured with amplified LER and/or LWR effect.
Public/Granted literature
- US20110037988A1 LINE EDGE ROUGHNESS MEASURING TECHNIQUE AND TEST STRUCTURE Public/Granted day:2011-02-17
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