Invention Grant
- Patent Title: Replacement apparatus for an optical element
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Application No.: US13170951Application Date: 2011-06-28
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Publication No.: US08488261B2Publication Date: 2013-07-16
- Inventor: Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
- Applicant: Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE10361441 20031223
- Main IPC: G02B7/02
- IPC: G02B7/02
Abstract:
A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
Public/Granted literature
- US20110255181A1 REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT Public/Granted day:2011-10-20
Information query
IPC分类:
| G | 物理 |
| G02 | 光学 |
| G02B | 光学元件、系统或仪器 |
| G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
| G02B7/02 | .用于透镜 |
