Invention Grant
- Patent Title: Method for determining a grey level etch mask
- Patent Title (中): 用于确定灰度级蚀刻掩模的方法
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Application No.: US13241011Application Date: 2011-09-22
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Publication No.: US08490028B2Publication Date: 2013-07-16
- Inventor: Vincent Farys , Stephanie Audran
- Applicant: Vincent Farys , Stephanie Audran
- Applicant Address: FR Crolles
- Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Crolles
- Agency: The Noblitt Group, PLLC
- Priority: FR1060373 20101210
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A method for determining, by means of a computer, a photolithography mask for the manufacturing a microstructure by grey level etching of a resist layer, this mask including a plurality of elementary cells, each including an opaque area arranged, in top view, in a non-peripheral portion of a transparent region or, conversely, in a transparent area arranged, in top view, in a non-peripheral portion of an opaque region, comprising the steps of: a) initializing the mask pattern in a first state; b) determining, by simulation, the profile of the microstructure which would result from the use of the mask according to said pattern; c) adjusting said pattern by modifying, in certain cells, the position of the opaque or transparent area within the cell; and d) forming the mask according to said pattern.
Public/Granted literature
- US20120148943A1 Method for Determining A Grey Level Etch Mask Public/Granted day:2012-06-14
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