Invention Grant
- Patent Title: Flexible substrate tensioner
- Patent Title (中): 柔性基板张紧器
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Application No.: US11953277Application Date: 2007-12-10
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Publication No.: US08490271B2Publication Date: 2013-07-23
- Inventor: Laurence A. Harvilchuck , George R. Westby
- Applicant: Laurence A. Harvilchuck , George R. Westby
- Applicant Address: US NY Binghamton
- Assignee: Universal Instruments Corporation
- Current Assignee: Universal Instruments Corporation
- Current Assignee Address: US NY Binghamton
- Agency: Schmeiser, Olsen & Watts LLP
- Main IPC: B23P11/02
- IPC: B23P11/02
Abstract:
Apparatus and method to aid in the reproducible and reversible tensioning of flexible substrates, such as polyimide or other file, to ensure planarity before, during, and after processing while mounted in tensioning apparatus.
Public/Granted literature
- US20090146355A1 FLEXIBLE SUBSTRATE TENSIONER Public/Granted day:2009-06-11
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