Invention Grant
- Patent Title: Loadlock designs and methods for using same
-
Application No.: US13229497Application Date: 2011-09-09
-
Publication No.: US08491248B2Publication Date: 2013-07-23
- Inventor: Chris Gage , Shawn Hamilton , Sheldon Templeton , Keith Wood , Damon Genetti
- Applicant: Chris Gage , Shawn Hamilton , Sheldon Templeton , Keith Wood , Damon Genetti
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: H01L21/677
- IPC: H01L21/677
Abstract:
Provided are apparatuses and methods disclosed for wafer processing. Specific embodiments include dual wafer handling systems that transfer wafers from storage cassettes to processing modules and back and aspects thereof. Stacked independent loadlocks that allow venting and pumping operations to work in parallel and may be optimized for particle reduction are provided. Also provided are annular designs for radial top down flow during loadlock vent and pumpdown.
Public/Granted literature
- US20120003063A1 LOADLOCK DESIGNS AND METHODS FOR USING SAME Public/Granted day:2012-01-05
Information query
IPC分类:
