Invention Grant
- Patent Title: Method for forming magnetic tunnel junction cell
- Patent Title (中): 形成磁性隧道结电池的方法
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Application No.: US12165363Application Date: 2008-06-30
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Publication No.: US08491799B2Publication Date: 2013-07-23
- Inventor: Jin-Ki Jung
- Applicant: Jin-Ki Jung
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: KR10-2007-0135011 20071221
- Main IPC: B44C1/22
- IPC: B44C1/22

Abstract:
A method for forming a magnetic tunnel junction cell includes forming a pinning layer, a pinned layer, a dielectric layer and a free layer over a first electrode, forming a second electrode on the free layer, etching the free layer and the dielectric layer using the second electrode as an etch barrier to form a first pattern, forming a prevention layer on a sidewall of the first pattern, and etching the pinned layer and the pinning layer using the second electrode and the prevention layer as an etch barrier to form a second pattern.
Public/Granted literature
- US20090159563A1 METHOD FOR FORMING MAGNETIC TUNNEL JUNCTION CELL Public/Granted day:2009-06-25
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