Invention Grant
- Patent Title: Methods of rejuvenating sputtering targets
- Patent Title (中): 振动溅射靶材的方法
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Application No.: US13465475Application Date: 2012-05-07
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Publication No.: US08491959B2Publication Date: 2013-07-23
- Inventor: Steven A. Miller , Olaf Schmidt-Park , Prabhat Kumar , Richard Wu , Shuwei Sun , Stefan Zimmerman
- Applicant: Steven A. Miller , Olaf Schmidt-Park , Prabhat Kumar , Richard Wu , Shuwei Sun , Stefan Zimmerman
- Applicant Address: US MA Newton
- Assignee: H.C. Starck Inc.
- Current Assignee: H.C. Starck Inc.
- Current Assignee Address: US MA Newton
- Agency: Bingham McCutchen LLP
- Main IPC: B05D1/02
- IPC: B05D1/02

Abstract:
In various embodiments, a sputtering target initially formed by ingot metallurgy or powder metallurgy and comprising a sputtering-target material is provided, the sputtering-target material (i) comprising a refractory metal, (ii) defining a recessed furrow therein, and (iii) having a first grain size and a first crystalline microstructure. A powder is spray-deposited within the furrow to form a layer therein, the layer (i) comprising the metal, (ii) having a second grain size finer than the first grain size, and (iii) having a second crystalline microstructure more random than the first crystalline microstructure. Spray-depositing the powder within the furrow forms a distinct boundary line between the layer and the sputtering-target material.
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