Invention Grant
- Patent Title: Method for producing a micromechanical component
- Patent Title (中): 微机械部件的制造方法
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Application No.: US13296923Application Date: 2011-11-15
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Publication No.: US08492188B2Publication Date: 2013-07-23
- Inventor: Heiko Stahl , Christina Leinenbach , Axel Franke , Jochen Reinmuth , Ando Feyh , Christian Rettig
- Applicant: Heiko Stahl , Christina Leinenbach , Axel Franke , Jochen Reinmuth , Ando Feyh , Christian Rettig
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102010061782 20101123
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for producing a micromechanical component is described. The method includes providing a substrate having a layer system including an insulating material situated on the substrate, a conductive layer section and a protective layer structure connected to the conductive layer section, which borders a section of the insulating material. The method furthermore includes carrying out an isotropic etching process for removing a part of the insulating material, the conductive layer section and the protective layer structure preventing the removal of the bordered section of the insulating material; and a structural element being developed, which includes the conductive layer section, the protective layer structure and the bordered section of the insulating material.
Public/Granted literature
- US20120129291A1 METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT Public/Granted day:2012-05-24
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