Invention Grant
US08492195B2 Method for forming stackable non-volatile resistive switching memory devices
有权
用于形成可堆叠的非易失性电阻式开关存储器件的方法
- Patent Title: Method for forming stackable non-volatile resistive switching memory devices
- Patent Title (中): 用于形成可堆叠的非易失性电阻式开关存储器件的方法
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Application No.: US12861650Application Date: 2010-08-23
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Publication No.: US08492195B2Publication Date: 2013-07-23
- Inventor: Scott Brad Herner
- Applicant: Scott Brad Herner
- Applicant Address: US CA Santa Clara
- Assignee: Crossbar, Inc.
- Current Assignee: Crossbar, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Ogawa P.C.
- Main IPC: H01L21/06
- IPC: H01L21/06

Abstract:
A method for forming a vertically stacked memory device includes forming a first dielectric material overlying a surface region of a semiconductor substrate, forming first memory cells overlying the first dielectric material including a first top metal wiring spatially extending in a first direction, a first bottom metal wiring spatially extending in a second direction orthogonal to the first direction, and first switching elements sandwiched in intersection regions between the first top metal wiring and the first bottom metal wiring, forming a second dielectric material overlying the first top metal wiring, forming second memory cells overlying the second dielectric material including a second top metal wiring extending in the first direction, a second bottom wiring spatially extending in the second direction, and second switching elements sandwiched in intersection regions of the second top metal wiring and the second bottom metal wiring.
Public/Granted literature
- US20120043621A1 STACKABLE NON-VOLATILE RESISTIVE SWITCHING MEMORY DEVICE AND METHOD Public/Granted day:2012-02-23
Information query
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