Invention Grant
US08492195B2 Method for forming stackable non-volatile resistive switching memory devices 有权
用于形成可堆叠的非易失性电阻式开关存储器件的方法

  • Patent Title: Method for forming stackable non-volatile resistive switching memory devices
  • Patent Title (中): 用于形成可堆叠的非易失性电阻式开关存储器件的方法
  • Application No.: US12861650
    Application Date: 2010-08-23
  • Publication No.: US08492195B2
    Publication Date: 2013-07-23
  • Inventor: Scott Brad Herner
  • Applicant: Scott Brad Herner
  • Applicant Address: US CA Santa Clara
  • Assignee: Crossbar, Inc.
  • Current Assignee: Crossbar, Inc.
  • Current Assignee Address: US CA Santa Clara
  • Agency: Ogawa P.C.
  • Main IPC: H01L21/06
  • IPC: H01L21/06
Method for forming stackable non-volatile resistive switching memory devices
Abstract:
A method for forming a vertically stacked memory device includes forming a first dielectric material overlying a surface region of a semiconductor substrate, forming first memory cells overlying the first dielectric material including a first top metal wiring spatially extending in a first direction, a first bottom metal wiring spatially extending in a second direction orthogonal to the first direction, and first switching elements sandwiched in intersection regions between the first top metal wiring and the first bottom metal wiring, forming a second dielectric material overlying the first top metal wiring, forming second memory cells overlying the second dielectric material including a second top metal wiring extending in the first direction, a second bottom wiring spatially extending in the second direction, and second switching elements sandwiched in intersection regions of the second top metal wiring and the second bottom metal wiring.
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