Invention Grant
US08492214B2 Damascene metal gate and shield structure, methods of manufacture and design structures
有权
大马士革金属门和屏蔽结构,制造和设计结构的方法
- Patent Title: Damascene metal gate and shield structure, methods of manufacture and design structures
- Patent Title (中): 大马士革金属门和屏蔽结构,制造和设计结构的方法
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Application No.: US13051510Application Date: 2011-03-18
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Publication No.: US08492214B2Publication Date: 2013-07-23
- Inventor: Brent A. Anderson , Andres Bryant , William F. Clark, Jr. , John J. Ellis-Monaghan , Edward J. Nowak
- Applicant: Brent A. Anderson , Andres Bryant , William F. Clark, Jr. , John J. Ellis-Monaghan , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale
- Main IPC: H01L21/338
- IPC: H01L21/338

Abstract:
Semiconductor structures with damascene metal gates and pixel sensor cell shields, methods of manufacture and design structures are provided. The method includes forming a dielectric layer over a dummy gate structure. The method further includes forming one or more recesses in the dielectric layer. The method further includes removing the dummy gate structure in the dielectric layer to form a trench. The method further includes forming metal in the trench and the one more recesses in the dielectric layer to form a damascene metal gate structure in the trench and one or more metal components in the one or more recesses.
Public/Granted literature
- US20120235216A1 DAMASCENE METAL GATE AND SHIELD STRUCTURE, METHODS OF MANUFACTURE AND DESIGN STRUCTURES Public/Granted day:2012-09-20
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