Invention Grant
US08492469B2 Positive-type photosensitive resin composition, cured film, protective film, insulating film, and semiconductor device and display device including the cured film 失效
正型感光性树脂组合物,固化膜,保护膜,绝缘膜和半导体装置以及包括固化膜的显示装置

Positive-type photosensitive resin composition, cured film, protective film, insulating film, and semiconductor device and display device including the cured film
Abstract:
A positive-type photosensitive resin composition includes (A) an alkali-soluble resin, (B) a photosensitizer, and (C) a silicon compound shown by the following general formula (1). (R2O)3—Si—R1—Si—(OR2)3  (1) wherein R1 represents an alkylene group having 5 to 30 carbon atoms or an organic group that includes at least one aromatic ring, and R2 represents an alkyl group having 1 to 10 carbon atoms. The positive-type photosensitive resin composition exhibits excellent storage stability, produces a film that exhibits excellent adhesion to a substrate during development, and produces a cured film that exhibits excellent adhesion to a substrate after humidification.
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