Invention Grant
US08492715B2 Method of protecting a radiation detector in a charged particle instrument
有权
保护带电粒子仪器中的辐射探测器的方法
- Patent Title: Method of protecting a radiation detector in a charged particle instrument
- Patent Title (中): 保护带电粒子仪器中的辐射探测器的方法
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Application No.: US13441344Application Date: 2012-04-06
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Publication No.: US08492715B2Publication Date: 2013-07-23
- Inventor: Maximus Theodorus Otten , Gerrit Cornelis Van Hoften , Joeri Lof
- Applicant: Maximus Theodorus Otten , Gerrit Cornelis Van Hoften , Joeri Lof
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Priority: EP11161427 20110407
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G21K7/00
Abstract:
The invention relates to a Method of protecting a direct electron detector (151) in a TEM. The invention involves predicting the current density on the detector before setting new beam parameters, such as changes to the excitation of condenser lenses (104), projector lenses (106) and/or beam energy. The prediction is made using an optical model or a Look-Up-Table. When the predicted exposure of the detector is less than a predetermined value, the desired changes are made, otherwise a warning message is generated and changes to the settings are postponed.
Public/Granted literature
- US20120256085A1 Method of protecting a radiation detector in a charged particle instrument Public/Granted day:2012-10-11
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