Invention Grant
- Patent Title: Thin film transistor and method of manufacturing the same
- Patent Title (中): 薄膜晶体管及其制造方法
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Application No.: US13035054Application Date: 2011-02-25
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Publication No.: US08492770B2Publication Date: 2013-07-23
- Inventor: Jae-Woo Park , Je-Hun Lee , Seong-Jin Lee , Yeon-Hong Kim
- Applicant: Jae-Woo Park , Je-Hun Lee , Seong-Jin Lee , Yeon-Hong Kim
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2010-0018421 20100302
- Main IPC: H01L29/786
- IPC: H01L29/786

Abstract:
A thin film transistor includes a gate electrode formed on a substrate, a semiconductor pattern overlapped with the gate electrode, a source electrode overlapped with a first end of the semiconductor pattern and a drain electrode overlapped with a second end of the semiconductor pattern and spaced apart from the source electrode. The semiconductor pattern includes an amorphous multi-elements compound including a II B element and a VI A element or including a III A element and a V A element and having an electron mobility no less than 1.0 cm2/Vs and an amorphous phase, wherein the VI A element excludes oxygen. Thus, a driving characteristic of the thin film transistor may be improved.
Public/Granted literature
- US20110215322A1 THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-09-08
Information query
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