Invention Grant
US08492812B2 Semiconductor device having dummy pattern and method of fabricating a semiconductor device comprising dummy pattern 失效
具有虚设图案的半导体器件和制造包括虚拟图案的半导体器件的方法

  • Patent Title: Semiconductor device having dummy pattern and method of fabricating a semiconductor device comprising dummy pattern
  • Patent Title (中): 具有虚设图案的半导体器件和制造包括虚拟图案的半导体器件的方法
  • Application No.: US13182175
    Application Date: 2011-07-13
  • Publication No.: US08492812B2
    Publication Date: 2013-07-23
  • Inventor: Kyung Ho Hwang
  • Applicant: Kyung Ho Hwang
  • Applicant Address: KR Icheon
  • Assignee: Hynix Semiconductor Inc.
  • Current Assignee: Hynix Semiconductor Inc.
  • Current Assignee Address: KR Icheon
  • Priority: KR10-2010-0130008 20101217
  • Main IPC: H01L27/108
  • IPC: H01L27/108 H01L29/94
Semiconductor device having dummy pattern and method of fabricating a semiconductor device comprising dummy pattern
Abstract:
A semiconductor device and a method for forming the same are disclosed. The semiconductor device includes a semiconductor substrate including a cell region and a peripheral circuit region, and an active region defined by a device isolation film, at least one dummy gate formed over the active region to expose a center part and both ends of the active region, a bit line contact plug formed between the dummy gates so as to be coupled to the center part of the active region, and a storage node contact plug that is spaced apart from the bit line contact plug by the dummy gate and is coupled to both ends of the active region. As a result, the problem that the storage node contact hole is not open in the semiconductor device can be solved, resulting in improved semiconductor device characteristics.
Public/Granted literature
Information query
Patent Agency Ranking
0/0