Invention Grant
- Patent Title: Micromechanical capacitive pressure transducer and production method
- Patent Title (中): 微机电容式压力传感器及其制作方法
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Application No.: US12086829Application Date: 2006-11-22
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Publication No.: US08492855B2Publication Date: 2013-07-23
- Inventor: Gerhard Lammel , Hubert Benzel , Simon Armbruster , Christoph Schelling , Joerg Brasas
- Applicant: Gerhard Lammel , Hubert Benzel , Simon Armbruster , Christoph Schelling , Joerg Brasas
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102005060855 20051220
- International Application: PCT/EP2006/068758 WO 20061122
- International Announcement: WO2007/071515 WO 20070628
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L29/84

Abstract:
The present invention describes a method for producing a micromechanical capacitive pressure transducer and a micromechanical component produced by this method. First, a first electrode is produced in a doped semiconductor substrate.In a further method step, a diaphragm with a second electrode is produced at the surface of the semiconductor substrate. Furthermore, it is provided to apply a first layer, which preferably is made of dielectric material, on the diaphragm and the semiconductor substrate. With the aid of this first layer, the diaphragm and the semiconductor substrate of the finished micromechanical capacitive pressure transducer are mechanically connected to one another directly or indirectly. Furthermore, a buried cavity is produced in the semiconductor substrate between the first and second electrode. In a following etching step, the diaphragm is finally dissolved out of the semiconductor substrate through openings in the first layer, the mechanical connection from the diaphragm to the semiconductor substrate being accomplished with the aid of the first layer. Due to this mechanical connection the diaphragm or the second electrode is able to be movably suspended above the first electrode.
Public/Granted literature
- US20090101997A1 Micromechanical Capacitive Pressure Transducer and Production Method Public/Granted day:2009-04-23
Information query
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