Invention Grant
- Patent Title: Test apparatus, test method and computer readable medium
- Patent Title (中): 测试仪器,测试方法和计算机可读介质
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Application No.: US12869545Application Date: 2010-08-26
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Publication No.: US08493083B2Publication Date: 2013-07-23
- Inventor: Toshiyuki Kiyokawa
- Applicant: Toshiyuki Kiyokawa
- Applicant Address: JP Tokyo
- Assignee: Advantest Corporation
- Current Assignee: Advantest Corporation
- Current Assignee Address: JP Tokyo
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R31/20

Abstract:
A test apparatus comprising a position information acquiring section that acquires position information concerning first terminals on a surface of a device under test and position information concerning second terminals on a surface of a probe card used for testing the device under test; a control section that calculates a displacement amount between each first terminal and a corresponding second terminal, based on the position information concerning the first terminals and the position information concerning the second terminals, and determines relative positions of the device under test and the probe card such that a maximum value from among the calculated displacement amounts is less than a predetermined value; and an aligning section that adjusts the relative positions of the device under test and the probe card, based on a signal from the control section, and electrically connects the device under test to the probe card.
Public/Granted literature
- US20110128024A1 TEST APPARATUS, TEST METHOD AND COMPUTER READABLE MEDIUM Public/Granted day:2011-06-02
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