Invention Grant
- Patent Title: Apparatus and method for active voltage compensation of electrostatic discharge of a substrate
- Patent Title (中): 用于基板静电放电的有源电压补偿的装置和方法
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Application No.: US12582909Application Date: 2009-10-21
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Publication No.: US08493084B2Publication Date: 2013-07-23
- Inventor: Bernhard Mueller
- Applicant: Bernhard Mueller
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Priority: EP08167188 20081021
- Main IPC: G01R31/20
- IPC: G01R31/20 ; G01R31/02
Abstract:
A voltage compensation assembly adapted for apparatus having a prober for contacting the electronic elements on a substrate is described. The voltage compensation assembly includes a controller connected to the prober and adapted for active voltage compensation, and a voltage measuring unit connected to the controller and for measuring a voltage on the substrate.
Public/Granted literature
- US20100097086A1 APPARATUS AND METHOD FOR ACTIVE VOLTAGE COMPENSATION Public/Granted day:2010-04-22
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