Invention Grant
- Patent Title: Automated model building and batch model building for a manufacturing process, process monitoring, and fault detection
- Patent Title (中): 用于制造过程，过程监控和故障检测的自动化建模和批量建模
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Application No.: US12202848Application Date: 2008-09-02
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Publication No.: US08494798B2Publication Date: 2013-07-23
- Inventor: Nouna Kettaneh , Svante Bjarne Wold
- Applicant: Nouna Kettaneh , Svante Bjarne Wold
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Proskauer Rose LLP
- Main IPC: G01N37/00
- IPC: G01N37/00
Abstract:
A method for creating a new model of a manufacturing process according to a multivariate analysis including selecting a set of data representative of multidimensional data measured during a step or phase of a manufacturing process. The method also includes determining a set of model generation conditions based on the set of data and generating the new model specifying intervals for the multidimensional data measured during a future manufacturing process based on the set of model generation conditions.
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