Invention Grant
US08495759B2 Probe aligning method for probe microscope and probe microscope operated by the same
有权
用于探针显微镜和探针显微镜的探针对准方法由其操作
- Patent Title: Probe aligning method for probe microscope and probe microscope operated by the same
- Patent Title (中): 用于探针显微镜和探针显微镜的探针对准方法由其操作
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Application No.: US12510794Application Date: 2009-07-28
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Publication No.: US08495759B2Publication Date: 2013-07-23
- Inventor: Shigeru Wakiyama , Hiroyoshi Yamamoto , Yoshiteru Shikakura , Itaru Kitajima
- Applicant: Shigeru Wakiyama , Hiroyoshi Yamamoto , Yoshiteru Shikakura , Itaru Kitajima
- Applicant Address: JP Chiba
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2008-197941 20080731
- Main IPC: G01Q10/00
- IPC: G01Q10/00

Abstract:
Provided is an aligning method capable of setting a sample observation unit such as an optical microscope to a probe microscope observation position at high precision. A sample having a known structure is used in advance. A surface of the sample and a shape of a cantilever provided with a probe are observed using the sample observation unit such as the optical microscope. A sample observation position and a probe position which are obtained using the sample observation unit are verified, and a relative positional relationship therebetween is recorded. Then, a first mark indicating a position of the cantilever and a second mark which is displayed in conjunction with the first mark and has the relative positional relationship with the first mark are produced to align the sample relative to the second mark.
Public/Granted literature
- US20100031402A1 PROBE ALIGNING METHOD FOR PROBE MICROSCOPE AND PROBE MICROSCOPE OPERATED BY THE SAME Public/Granted day:2010-02-04
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