Invention Grant
US08496133B2 Container for housing a mask blank, method of housing a mask blank, and a mask blank package
有权
用于容纳掩模坯料的容器，容纳掩模坯料的方法和掩模坯料封装
- Patent Title: Container for housing a mask blank, method of housing a mask blank, and a mask blank package
- Patent Title (中): 用于容纳掩模坯料的容器，容纳掩模坯料的方法和掩模坯料封装
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Application No.: US12566297Application Date: 2009-09-24
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Publication No.: US08496133B2Publication Date: 2013-07-30
- Inventor: Yasuhiro Mizukoshi , Osamu Hanaoka
- Applicant: Yasuhiro Mizukoshi , Osamu Hanaoka
- Applicant Address: JP Tokyo
- Assignee: Hoya Corporation
- Current Assignee: Hoya Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2008-249337 20080927
- Main IPC: B65D6/24
- IPC: B65D6/24 ; B65D45/20
Abstract:
A mask blank container adapted to house a mask blank with a resist film. The container comprises a container body 5 for receiving the mask blank; a cap member 6 to be put on the container body; and a fixing member 9 adapted to fix the container body and the cap member to each other when the cap member is put on the container body. The container body and the cap member have fitting portions 51 and 61 made of a resin material and fitted to each other, respectively. The fixing member comprises a first member 91 having an engaging portion 91 a to be engaged with the fitting portion of the cap member, and a second member 92 having an engaging portion 93 to be engaged with the fitting portion of the container body. A distance between the engaging portions of the first and the second members is desired to be variable.
Public/Granted literature
- US20100078433A1 CONTAINER FOR HOUSING A MASK BLANK, METHOD OF HOUSING A MASK BLANK, AND A MASK BLANK PACKAGE Public/Granted day:2010-04-01
Information query
IPC分类:
