Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
- Patent Title (中): 印刷装置及制品制造方法
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Application No.: US12963890Application Date: 2010-12-09
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Publication No.: US08496462B2Publication Date: 2013-07-30
- Inventor: Atsushi Kimura
- Applicant: Atsushi Kimura
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2009-279814 20091209
- Main IPC: B29C45/76
- IPC: B29C45/76

Abstract:
The present invention provides an imprint apparatus which transfers a pattern of a mold onto a resin applied on a substrate, including a structure including a mold chuck which holds the mold, a first measurement unit configured to measure a position of a reference portion of the structure, a second measurement unit configured to measure a position of the mold with respect to the reference portion, and a controller configured to control a relative positional relationship between the mold and the substrate, based on the measurement result obtained by the first measurement unit and the measurement result obtained by the second measurement unit, the second measurement unit including a head formed on the mold chuck, and measuring the position of the mold with respect to the reference portion by reading a scale formed on the mold by the head.
Public/Granted literature
- US20110133354A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2011-06-09
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