Invention Grant
US08496752B2 Method and apparatus for venting gas between a crucible and a susceptor
有权
用于在坩埚和基座之间排放气体的方法和装置
- Patent Title: Method and apparatus for venting gas between a crucible and a susceptor
- Patent Title (中): 用于在坩埚和基座之间排放气体的方法和装置
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Application No.: US12552960Application Date: 2009-09-02
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Publication No.: US08496752B2Publication Date: 2013-07-30
- Inventor: Katsuhiko Kemmochi , Robert Joseph Coolich , Michael Randall Fallows
- Applicant: Katsuhiko Kemmochi , Robert Joseph Coolich , Michael Randall Fallows
- Applicant Address: US WA Camas
- Assignee: Heraeus Shin-Etsu America, Inc.
- Current Assignee: Heraeus Shin-Etsu America, Inc.
- Current Assignee Address: US WA Camas
- Agency: Marger Johnson & McCollom PC
- Main IPC: C30B15/02
- IPC: C30B15/02
Abstract:
During a CZ or similar process, a silica crucible is held in a graphite or similar susceptor while being heated to above between about 1580 and 1620 degrees C. Vents or grooves formed in at least one of the outer surface of the crucible and the inner surface of the susceptor permit gasses to vent upwardly and out from between the crucible and susceptor. This permits gas evolved from the crucible as a result of the heat to be vented rather than expanding between the crucible and susceptor thereby deforming the crucible.
Public/Granted literature
- US20110048315A1 METHOD AND APPARATUS FOR VENTING GAS BETWEEN A CRUCIBLE AND A SUSCEPTOR Public/Granted day:2011-03-03
Information query
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