Invention Grant
- Patent Title: Arrangement in connection with ALD reactor
- Patent Title (中): 与ALD反应堆有关的安排
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Application No.: US12937782Application Date: 2009-06-09
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Publication No.: US08496753B2Publication Date: 2013-07-30
- Inventor: Mika Jauhiainen , Pekka Soininen
- Applicant: Mika Jauhiainen , Pekka Soininen
- Applicant Address: FI Vantaa
- Assignee: Beneq Oy
- Current Assignee: Beneq Oy
- Current Assignee Address: FI Vantaa
- Agency: Oliff & Berridge, PLC
- Priority: FI20085580 20080612
- International Application: PCT/FI2009/050487 WO 20090609
- International Announcement: WO2009/150297 WO 20091217
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C16/455

Abstract:
The invention relates to an arrangement in connection with an ALD reactor comprising a reaction chamber, the arrangement comprising fittings for feeding a reaction gas to the reaction chamber and for suctioning the reaction gas back, and fittings for feeding a barrier gas. The fittings for feeding and suctioning back the reaction gas and for feeding the barrier gas comprise a middle element having multiple parallel channels which extend through the element, and a first and a second flow-reversing element arranged at ends of the middle element into which the channels open, the flow-reversing elements being arranged to combine the channels in the middle element so as to provide an interchannel flow.
Public/Granted literature
- US20110036291A1 ARRANGEMENT IN CONNECTION WITH ALD REACTOR Public/Granted day:2011-02-17
Information query
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