Invention Grant
- Patent Title: On-the fly laser beam path dithering for enhancing throughput
- Patent Title (中): 用于增强吞吐量的飞行激光束路径抖动
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Application No.: US11925562Application Date: 2007-10-26
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Publication No.: US08497450B2Publication Date: 2013-07-30
- Inventor: Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
- Applicant: Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
- Applicant Address: US OR Portland
- Assignee: Electro Scientific Industries, Inc.
- Current Assignee: Electro Scientific Industries, Inc.
- Current Assignee Address: US OR Portland
- Agency: Stoel Rives LLP
- Main IPC: B23K26/00
- IPC: B23K26/00 ; B23K26/06 ; B23K26/16
Abstract:
A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
Public/Granted literature
- US20080093349A1 ON-THE-FLY LASER BEAM PATH DITHERING FOR ENHANCING THROUGHPUT Public/Granted day:2008-04-24
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