Invention Grant
- Patent Title: Detector arrangement having increased sensitivity
- Patent Title (中): 检测器布置灵敏度增加
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Application No.: US12856792Application Date: 2010-08-16
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Publication No.: US08497464B2Publication Date: 2013-07-30
- Inventor: Wolfgang Bathe , Michael Goelles , Mirko Liedtke
- Applicant: Wolfgang Bathe , Michael Goelles , Mirko Liedtke
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Jacobson Holman PLLC
- Priority: DE102009038028 20090818
- Main IPC: G01D5/30
- IPC: G01D5/30 ; H01J3/14 ; H01L27/00

Abstract:
To increase the sensitivity of detector arrangements, it is known that light deflection elements in the form of a line arrays having spherical elements may be used to focus incident light onto light-sensitive regions of the detector. Manufacturing such line arrays is complex and cost intensive, especially in small lot numbers. The increased sensitivity of the detector array can be achieved easily and inexpensively by using a novel light deflection element. The detector arrangement therefore has a light deflection element having light entrance surfaces, deflecting incident light by refraction onto light-sensitive regions of the detector. Light entrance surfaces of the light deflection element are inclined with respect to one another and are designed as planar surfaces. The detector arrangement is suitable in particular for detection of light emanating from a specimen in a microscope, preferably in a laser-scanning microscope.
Public/Granted literature
- US20110042555A1 DETECTOR ARRANGEMENT HAVING INCREASED SENSITIVITY Public/Granted day:2011-02-24
Information query
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