Invention Grant
US08497529B2 Trench generated device structures and design structures for radiofrequency and BiCMOS integrated circuits
有权
沟槽产生的射频和BiCMOS集成电路的器件结构和设计结构
- Patent Title: Trench generated device structures and design structures for radiofrequency and BiCMOS integrated circuits
- Patent Title (中): 沟槽产生的射频和BiCMOS集成电路的器件结构和设计结构
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Application No.: US12552354Application Date: 2009-09-02
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Publication No.: US08497529B2Publication Date: 2013-07-30
- Inventor: Brent A. Anderson , Edward J. Nowak
- Applicant: Brent A. Anderson , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Wood, Herron & Evans LLP
- Agent Anthony J. Canale
- Main IPC: H01L31/072
- IPC: H01L31/072

Abstract:
Trench-generated device structures fabricated using a semiconductor-on-insulator (SOI) wafer, design structures embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit, as well as methods for fabricating trench-generated device structures. The device structure includes a trench extending through the semiconductor and insulator layers of the SOI wafer and into the underlying semiconductor substrate, and a first doped region in the semiconductor substrate. The doped region, which extends about the trench, has a second conductivity type opposite to the first conductivity type. The device structure further includes a first contact extending from the top surface through the semiconductor and insulator layers to a portion of the semiconductor substrate outside of the doped region, and a second contact extending from the top surface through the semiconductor and insulator layers to the doped region in the semiconductor substrate.
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