Invention Grant
US08497529B2 Trench generated device structures and design structures for radiofrequency and BiCMOS integrated circuits 有权
沟槽产生的射频和BiCMOS集成电路的器件结构和设计结构

Trench generated device structures and design structures for radiofrequency and BiCMOS integrated circuits
Abstract:
Trench-generated device structures fabricated using a semiconductor-on-insulator (SOI) wafer, design structures embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit, as well as methods for fabricating trench-generated device structures. The device structure includes a trench extending through the semiconductor and insulator layers of the SOI wafer and into the underlying semiconductor substrate, and a first doped region in the semiconductor substrate. The doped region, which extends about the trench, has a second conductivity type opposite to the first conductivity type. The device structure further includes a first contact extending from the top surface through the semiconductor and insulator layers to a portion of the semiconductor substrate outside of the doped region, and a second contact extending from the top surface through the semiconductor and insulator layers to the doped region in the semiconductor substrate.
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