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US08497539B2 Semiconductor device and its manufacturing method 有权
半导体器件及其制造方法

Semiconductor device and its manufacturing method
Abstract:
To realize miniaturization/high integration and increase in the amount of accumulated charges, and to give a memory structure having a high reliability. A 1 transistor 1 capacitor (1T1C) structure having 1 ferroelectric capacitor structure and 1 selection transistor every memory cell is adopted, and respective capacitor structures are disposed respectively in either one layer of interlayer insulating films of 2 layers having different heights from the surface of a semiconductor substrate.
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