Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing same
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US13234260Application Date: 2011-09-16
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Publication No.: US08497543B2Publication Date: 2013-07-30
- Inventor: Jun Ogi , Takeshi Kamigaichi , Tatsuo Izumi
- Applicant: Jun Ogi , Takeshi Kamigaichi , Tatsuo Izumi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-062754 20110322
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A semiconductor memory device includes a semiconductor substrate, a plurality of element isolations, a plurality of first stacked bodies, a second stacked body, and an interlayer insulating film. Distance between each of the first stacked bodies and the second stacked body is longer than distance between adjacent ones of the first stacked bodies. A first void is formed in the interlayer insulating film between the first stacked bodies. A second void is formed in the interlayer insulating film between one of the first stacked bodies and the second stacked body. And, a lower end of the second void is located above a lower end of the first void.
Public/Granted literature
- US20120241910A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2012-09-27
Information query
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