Invention Grant
US08497554B2 Semiconductor device comprising metal gate structures formed by a replacement gate approach and efuses including a silicide
有权
半导体器件包括通过替换栅极方法形成的金属栅极结构和包括硅化物的熔点
- Patent Title: Semiconductor device comprising metal gate structures formed by a replacement gate approach and efuses including a silicide
- Patent Title (中): 半导体器件包括通过替换栅极方法形成的金属栅极结构和包括硅化物的熔点
-
Application No.: US12942506Application Date: 2010-11-09
-
Publication No.: US08497554B2Publication Date: 2013-07-30
- Inventor: Andy Wei , Jens Heinrich , Ralf Richter
- Applicant: Andy Wei , Jens Heinrich , Ralf Richter
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams, Morgan & Amerson, P.C.
- Priority: DE102010003559 20100331
- Main IPC: H01L23/62
- IPC: H01L23/62

Abstract:
In a replacement gate approach for forming high-k metal gate electrode structures, electronic fuses may be provided on the basis of a semiconductor material in combination with a metal silicide by using a recessed surface topography and/or a superior selectivity of the metal silicide material during the replacement gate process. For example, in some illustrative embodiments, electronic fuses may be provided in a recessed portion of an isolation region, thereby avoiding the removal of the semiconductor material when replacing the semiconductor material of the gate electrode structures with a metal-containing electrode material. Consequently, the concept of well-established semiconductor-based electronic fuses may be applied together with sophisticated replacement gate structures of transistors.
Public/Granted literature
Information query
IPC分类: