Invention Grant
US08497555B2 Vertical memory devices including indium and/or gallium channel doping
有权
垂直存储器件包括铟和/或镓通道掺杂
- Patent Title: Vertical memory devices including indium and/or gallium channel doping
- Patent Title (中): 垂直存储器件包括铟和/或镓通道掺杂
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Application No.: US13298728Application Date: 2011-11-17
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Publication No.: US08497555B2Publication Date: 2013-07-30
- Inventor: Jin-Gyun Kim , Ki-Hyun Hwang , Sung-Hae Lee , Ji-Hoon Choi
- Applicant: Jin-Gyun Kim , Ki-Hyun Hwang , Sung-Hae Lee , Ji-Hoon Choi
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2010-0130396 20101220
- Main IPC: H01L29/792
- IPC: H01L29/792 ; G11C11/40

Abstract:
A vertical memory device may include a substrate, a first selection line on the substrate, a plurality of word lines on the first selection line, a second selection line on the plurality of word lines, and a semiconductor channel. The first selection line may be between the plurality of word lines and the substrate, and the plurality of word lines may be between the first and second selection lines. Moreover, the first and second selection lines and the plurality of word lines may be spaced apart in a direction perpendicular with respect to a surface of the substrate. The semiconductor channel may extend away from the surface of the substrate adjacent sidewalls of the first and second selection lines and the plurality of word lines. In addition, portions of the semiconductor channel adjacent the second selection line may be doped with indium and/or gallium. Related methods are also discussed.
Public/Granted literature
- US20120153291A1 Vertical Memory Devices Including Indium And/Or Gallium Channel Doping Public/Granted day:2012-06-21
Information query
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