Invention Grant
- Patent Title: Method to improve bump reliability for flip chip device
- Patent Title (中): 提高倒装芯片器件的突发可靠性的方法
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Application No.: US10810965Application Date: 2004-03-26
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Publication No.: US08497584B2Publication Date: 2013-07-30
- Inventor: Yen-Ming Chen , Chia-Fu Lin , Shun-Liang Hsu , Kai-Ming Ching , Hsin-Hui Lee , Chao-Yuan Su , Li-Chih Chen
- Applicant: Yen-Ming Chen , Chia-Fu Lin , Shun-Liang Hsu , Kai-Ming Ching , Hsin-Hui Lee , Chao-Yuan Su , Li-Chih Chen
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company
- Current Assignee: Taiwan Semiconductor Manufacturing Company
- Current Assignee Address: TW Hsin-Chu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A new method is provided for the creation of a solder bump. Conventional methods are initially followed, creating a patterned layer of Under Bump Metal over the surface of a contact pad. A layer of photoresist is next deposited, this layer of photoresist is patterned and developed creating a resist mask having a T-shape opening aligned with the contact pad. This T-shaped opening is filled with a solder compound, creating a T-shaped layer of solder compound on the surface of the layer of UBM. The layer of photoresist is removed, exposing the created T-shaped layer of solder compound, further exposing the layer of UBM. The layer of UBM is etched using the T-shaped layer of solder compound as a mask. Reflow of the solder compound results in creating a solder ball.
Public/Granted literature
- US20040180296A1 Novel method to improve bump reliability for flip chip device Public/Granted day:2004-09-16
Information query
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