Invention Grant
- Patent Title: Long range travel MEMS actuator
- Patent Title (中): 远程行程MEMS执行器
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Application No.: US12761621Application Date: 2010-04-16
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Publication No.: US08497619B2Publication Date: 2013-07-30
- Inventor: Mostafa Medhat , Yasseen Nada , Bassem Mortada , Bassam A. Saadany
- Applicant: Mostafa Medhat , Yasseen Nada , Bassem Mortada , Bassam A. Saadany
- Applicant Address: EG Cairo
- Assignee: Si-Ware Systems
- Current Assignee: Si-Ware Systems
- Current Assignee Address: EG Cairo
- Agency: Garlick & Markison
- Agent Holly L Rudnick
- Main IPC: H02N1/00
- IPC: H02N1/00 ; H01L41/04

Abstract:
An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.
Public/Granted literature
- US20100264777A1 LONG RANGE TRAVEL MEMS ACTUATOR Public/Granted day:2010-10-21
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