Invention Grant
US08497742B2 Multi-layer waveguide structure having spaced apart first and second signal units of different widths and heights 有权
具有不同宽度和高度的间隔开的第一和第二信号单元的多层波导结构

Multi-layer waveguide structure having spaced apart first and second signal units of different widths and heights
Abstract:
A waveguide of a multi-layer metal structure and a manufacturing method thereof are provided, the method including applying a plurality of metal layers on a substrate and a plurality of insulating layers respectively between the respective metal layers. Accordingly, it is possible to minimize conductive loss by dispersing current uniformly through wide regions between a signal line and ground lines.
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