Invention Grant
US08497966B2 FFS type TFT-LCD array substrate and manufacturing method thereof
有权
FFS型TFT-LCD阵列基板及其制造方法
- Patent Title: FFS type TFT-LCD array substrate and manufacturing method thereof
- Patent Title (中): FFS型TFT-LCD阵列基板及其制造方法
-
Application No.: US12836028Application Date: 2010-07-14
-
Publication No.: US08497966B2Publication Date: 2013-07-30
- Inventor: Seungjin Choi , Youngsuk Song , Seongyeol Yoo
- Applicant: Seungjin Choi , Youngsuk Song , Seongyeol Yoo
- Applicant Address: CN Beijing
- Assignee: Beijing Boe Optoelectronics Technology Co., Ltd.
- Current Assignee: Beijing Boe Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Ladas & Parry LLP
- Priority: CN200910089384 20090716
- Main IPC: G02F1/1343
- IPC: G02F1/1343

Abstract:
A manufacturing method for an FFS type TFT-LCD array substrate comprises: depositing a first metal film on a transparent substrate, and form a gate line, a gate electrode and a common electrode line by a first patterning process; depositing a gate insulating layer, an active layer film and a second metal film sequentially and patterning the second metal film and the active layer film by a second patterning process; Step 3 depositing a first transparent conductive film and patterning the first transparent conductive film, the second metal film and the active layer film by a third patterning process; depositing a passivation layer, forming a connection hole by patterning the passivation layer through the fourth patterning process, performing an ashing process on photoresist used in the fourth patterning process, depositing a second transparent conductive layer on the remaining photoresist, and forming a common electrode by a lifting-off process.
Public/Granted literature
- US20110013130A1 FFS TYPE TFT-LCD ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF Public/Granted day:2011-01-20
Information query
IPC分类: