Invention Grant
- Patent Title: System and method for inspection of a workpiece surface using multiple scattered light collectors
- Patent Title (中): 使用多个散射光收集器检测工件表面的系统和方法
-
Application No.: US11311943Application Date: 2005-12-17
-
Publication No.: US08497984B2Publication Date: 2013-07-30
- Inventor: Richard Earl Bills , Neil Judell , Timothy R. Tiemeyer , James Peter McNiven
- Applicant: Richard Earl Bills , Neil Judell , Timothy R. Tiemeyer , James Peter McNiven
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Agent Rick Barnes
- Main IPC: G01N21/88
- IPC: G01N21/88

Abstract:
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. Certain of these components, most notably the beam source subsystem, the beam scanning subsystem and the optical collection and detection subsystem are modular for ready field replacement and/or maintenance. The optical collection and detection system features wing collectors in the front quartersphere and back collectors in the back quartersphere for collected light scattered from the surface of the workpiece. This can greatly improve the measurement capabilities of the system. Also included is a method for detecting asymmetric defects using the wing collectors and back collectors.
Public/Granted literature
- US20060256326A1 System and method for inspection of a workpiece surface using multiple scattered light collectors Public/Granted day:2006-11-16
Information query