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US08498067B2 Optical element holding apparatus, barrel, exposure apparatus, and manufacturing method for device 有权
光学元件保持装置，镜筒，曝光装置及其制造方法

  • Patent Title: Optical element holding apparatus, barrel, exposure apparatus, and manufacturing method for device
  • Patent Title (中): 光学元件保持装置，镜筒，曝光装置及其制造方法
  • Application No.: US13159305
    Application Date: 2011-06-13
  • Publication No.: US08498067B2
    Publication Date: 2013-07-30
  • Inventor: Youichi Arai
  • Applicant: Youichi Arai
  • Applicant Address: JP Tokyo
  • Assignee: Nikon Corporation
  • Current Assignee: Nikon Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Klarquist Sparkman, LLP
  • Priority: JP2007-113049 20070423
  • Main IPC: G02B7/02
  • IPC: G02B7/02
Optical element holding apparatus, barrel, exposure apparatus, and manufacturing method for device
Abstract:
An optical element holding apparatus includes an annular vibration attenuation plate, which covers a peripheral portion of a lens, and a connection member, which is formed of a damping alloy and which fixes the vibration attenuation plate to a frame body in a state of non-contact with the surface of the lens. The vibration attenuation plate and nitrogen gas in a clearance between the vibration attenuation plate and the surface of the lens form a squeeze film damper.
Abstract(Chinese):

光学元件保持装置包括覆盖透镜的周边部分的环形振动衰减板和由阻尼合金形成并且将振动衰减板固定在框体上的连接构件， 与透镜表面接触。 振动衰减板和振动衰减板与透镜表面之间的间隙中的氮气形成挤压膜阻尼器。

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