Invention Grant
US08498501B2 Semiconductor optical modulator and semiconductor mach-zehnder optical modulator
失效
半导体光调制器和半导体马赫 - 泽恩光调制器
- Patent Title: Semiconductor optical modulator and semiconductor mach-zehnder optical modulator
- Patent Title (中): 半导体光调制器和半导体马赫 - 泽恩光调制器
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Application No.: US13321903Application Date: 2010-05-12
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Publication No.: US08498501B2Publication Date: 2013-07-30
- Inventor: Kenji Sato , Tomoaki Kato
- Applicant: Kenji Sato , Tomoaki Kato
- Applicant Address: JP Tokyo
- Assignee: NEC Corporation
- Current Assignee: NEC Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2009-128340 20090527
- International Application: PCT/JP2010/058010 WO 20100512
- International Announcement: WO2010/137458 WO 20101202
- Main IPC: G02F1/035
- IPC: G02F1/035 ; G02F1/295

Abstract:
Provided are a semiconductor optical modulator and a semiconductor Mach-Zehnder optical modulator of high efficiency and high reliability.The semiconductor optical modulator 10 of the present invention includes a substrate 11; a first n-type cladding layer 12; a semiconductor optical modulation layer 13; a p-type cladding layer 14; a second n-type cladding layer 15; a passivation film 19; and an electric field-relaxing layer 16, wherein the first n-type cladding layer 12, the semiconductor optical modulation layer 13, the p-type cladding layer 14, and the second n-type cladding layer 15 are laminated on the substrate 11 in this order to form a waveguide structure, the passivation film 19 is arranged at the side surfaces of the waveguide structure, the electric field-relaxing layer 16 is interposed between the p-type cladding layer 14 and the second n-type cladding layer 15, and an impurity concentration of the electric field-relaxing layer 16 is lower than that of the p-type cladding layer 14 and that of the second n-type cladding layer 15.
Public/Granted literature
- US20120183249A1 SEMICONDUCTOR OPTICAL MODULATOR AND SEMICONDUCTOR MACH-ZEHNDER OPTICAL MODULATOR Public/Granted day:2012-07-19
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