Invention Grant
US08498501B2 Semiconductor optical modulator and semiconductor mach-zehnder optical modulator 失效
半导体光调制器和半导体马赫 - 泽恩光调制器

  • Patent Title: Semiconductor optical modulator and semiconductor mach-zehnder optical modulator
  • Patent Title (中): 半导体光调制器和半导体马赫 - 泽恩光调制器
  • Application No.: US13321903
    Application Date: 2010-05-12
  • Publication No.: US08498501B2
    Publication Date: 2013-07-30
  • Inventor: Kenji SatoTomoaki Kato
  • Applicant: Kenji SatoTomoaki Kato
  • Applicant Address: JP Tokyo
  • Assignee: NEC Corporation
  • Current Assignee: NEC Corporation
  • Current Assignee Address: JP Tokyo
  • Priority: JP2009-128340 20090527
  • International Application: PCT/JP2010/058010 WO 20100512
  • International Announcement: WO2010/137458 WO 20101202
  • Main IPC: G02F1/035
  • IPC: G02F1/035 G02F1/295
Semiconductor optical modulator and semiconductor mach-zehnder optical modulator
Abstract:
Provided are a semiconductor optical modulator and a semiconductor Mach-Zehnder optical modulator of high efficiency and high reliability.The semiconductor optical modulator 10 of the present invention includes a substrate 11; a first n-type cladding layer 12; a semiconductor optical modulation layer 13; a p-type cladding layer 14; a second n-type cladding layer 15; a passivation film 19; and an electric field-relaxing layer 16, wherein the first n-type cladding layer 12, the semiconductor optical modulation layer 13, the p-type cladding layer 14, and the second n-type cladding layer 15 are laminated on the substrate 11 in this order to form a waveguide structure, the passivation film 19 is arranged at the side surfaces of the waveguide structure, the electric field-relaxing layer 16 is interposed between the p-type cladding layer 14 and the second n-type cladding layer 15, and an impurity concentration of the electric field-relaxing layer 16 is lower than that of the p-type cladding layer 14 and that of the second n-type cladding layer 15.
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