Invention Grant
- Patent Title: Atomic force microscopes and methods of measuring specimens using the same
- Patent Title (中): 原子力显微镜和使用其测量样品的方法
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Application No.: US12929674Application Date: 2011-02-08
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Publication No.: US08499360B2Publication Date: 2013-07-30
- Inventor: Yonmook Park
- Applicant: Yonmook Park
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd
- Current Assignee: Samsung Electronics Co., Ltd
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.LC.
- Priority: KR10-2010-014020 20100217
- Main IPC: G01Q10/04
- IPC: G01Q10/04

Abstract:
Atomic force microscopes and methods of measuring specimens using the same. An atomic force microscope may precisely measure a 3D shape of a specimen using both a short-stroke scanner and a long-stroke scanner. The atomic force microscope may include a stage to transfer a specimen, at least one cantilever which includes a probe such that a driving displacement and a driving frequency are changed by attractive force and repulsive force in relation to atoms of the specimen, at least one short-stroke scanner which includes the cantilever so as to perform short-stroke scanning of the specimen, at least one long-stroke scanner which includes the short-stroke scanner so as to perform long-stroke scanning of the specimen, and at least one coarse approach system for transferring the short-stroke scanner and the long-stroke scanner to the specimen.
Public/Granted literature
- US20110203020A1 Atomic force microscopes and methods of measuring specimens using the same Public/Granted day:2011-08-18
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