Invention Grant
US08499430B2 Assembly method of transfer mechanism and transfer chamber 失效
传输机构和传送室的装配方法

Assembly method of transfer mechanism and transfer chamber
Abstract:
An assembly method is capable of assembling a transfer mechanism which transfers a target and includes a pick unit for holding the target, a slide unit for sliding the pick unit and a drive unit for driving the slide unit. The assembly method includes installing a lifting mechanism for lifting the units at a ceiling portion of a transfer chamber where the transfer mechanism is accommodated; and assembling the units loaded into the transfer chamber inside the transfer chamber by using the lifting mechanism.
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