Invention Grant
- Patent Title: Mounting system for torsional suspension of a MEMS device
- Patent Title (中): MEMS器件的扭转悬挂安装系统
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Application No.: US12249681Application Date: 2008-10-10
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Publication No.: US08499629B2Publication Date: 2013-08-06
- Inventor: Gary Ballas , Galen Magendanz
- Applicant: Gary Ballas , Galen Magendanz
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Lowe Graham Jones PLLC
- Main IPC: G01P1/02
- IPC: G01P1/02

Abstract:
A mounting system for a MEMS device includes a proof mass selectively coupled to a substrate using a centrally located, single anchor mount that minimizes sensitivity to strain variations experienced by the MEMS device. The mounting system may include isolation cuts arranged in the proof mass to advantageously achieve a desired amount of strain isolation and to produce hinges that extend in opposite directions from the anchor mount. The single anchor mount is arranged to reduce a separation distance from a mid-point or centroid of the anchor mount to its perimeter as compared to conventional mounting schemes that have multiple anchor mounts positioned distally from a common mid-point.
Public/Granted literature
- US20100089154A1 MOUNTING SYSTEM FOR TORSIONAL SUSPENSION OF A MEMS DEVICE Public/Granted day:2010-04-15
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